Gas Flow Measurement and Control Products - Micro Flow Sensor Applied Products - Gas Mass Flow Meter for Hydrogen and Helium gases CMS series - flow rate range: 0 - 50 L/min (standard), with display, flow direction: left to right, material: 316 stainless steel, connection: UNF, CMS0500/1000/2000: 3/4" - 16" UNF, CMS0010/0050/0005/0200: 9/16" - 18" UNF, gas type: hydrogen, helium, output: 4 - 20 mA / 0 - 5 Vdc / 1- 5 Vdc, with RS-485 communication, degreasing for gas-contacting parts, no optional function.
Azbil CMS Gas Mass Flow Meter for Hydrogen and Helium Gases incorporates a thermal microflow sensor developed by Azbil Corporation built with micro-machining and thin-film technologies. By integrating this sensor with advanced channel design technology, it was possible to achieve new levels of accuracy and measurement range at a low price. Because the CMS is a mass flowmeter, its measurements are not affected by temperature or pressure. High accuracy of ± 5% rdg. and high resolution. Analog output signals can be switched among 0 - 5 V, 1 - 5 V, and 4 - 20 mA by the keys. The CMS' functions include instantaneous flow rate indication, totalized or reverse-totalized flow display, event output, totalizer pulse output, totalized flow reset input, output scaling, gas type switching, etc. for a variety of applications.