Air Mass Flow Sensor
Air Mass Flow Sensor
Azbil MCS100 Air Mass Flow Sensor series is appropriate for applications where there are frequent changes in fluid condition (temperature, supply pressure, or altitude). MCS Flow Sensors can be used for (1) Control of suction flow rate in gas detectors, air samplers etc. (2) Control or monitoring of supply flow rate for oxygen concentrators, etc. (3) Monitoring purge or cooling flow rate for wire bonders, etc. (4) Pick-up and placement detection of miniature electronic or optical devices. Applicable gases include: Air, Nitrogen and Oxygen*. Gas must be clean and dry, without corrosive components such as chlorine, sulfur and acid, and without dust or oil mist.
Corrosive gases cannot be measured. Low tolerance for foreign matter deposits (filter installation required).
*Fluid conditions for use with oxygen: supply pressure 50 kPa or less, concentration 95%.
Azbil MCS100 Air Mass Flow Sensors are compact, fast response air mass flow sensors. With its combination of thermal MEMS sensor and a flow path with low pressure loss, the MCS can measure air flows under 10L/min with a fast 5 ms response and is unaffected by changes in pressure and temperature. The sensor is located in the pope wall and detects slight flow rate differences. Symmetric structure measures reverse flow as well. Any mount position is okay, and there is no need for a straight pipe section with low pressure loss (models with built in flow rectifier). Bidirectional flow range models are available. Only weighs 9 g. Pipe size 1/8” (MS female [brass insert]). Flow range -3 to 3 L/min, 0 to 3 L/min, -0.5 to 0.5 L/min, 0 to 0.5 L/min and 0 to 10 L/min depending on the model. Accuracy ±5% FS or ±6 FS depending on the model. Operating temperature 32°F (0°C) to 122°F (50°C) for both ambient and gas temperatures. Operating humidity 10 to 80% RH, no condensation allowed. Operating pressure –100 to 200 kPa (range for assured pressure characteristics: -70 to 200 kPa). 1-5V output (non-linear). Low power consumption (12 mA max. at 24 Vdc). CE approved.
Panel mount indicator for MCS100 available (Model MCW401A100), sold separately. Compatible MCS100 models: MCS100A100, MSC100A104, MCS100A108, MCS100A112 and MCS11A120