Sapphire Capacitance Diaphragm Gauge

Sapphire Capacitance Diaphragm Gauge

SKU SPG
UOM Each

The Azbil SPG is especially suited for semiconductor manufacturing. Applications include film deposition equipment, freeze-drying equipment, vacuum furnace, vacuum pump evaluation equipment, etc.


Included Products

SLP-SP5J70

SLP-SP5J70

$960.00


SPG5AT10RD000000

SPG5AT10RD000000

$5,843.00


SPG5AT12DD000000

SPG5AT12DD000000

$6,780.00


SPG5AT12ED000000

SPG5AT12ED000000

$7,980.00


SPG5AT22ED000000

SPG5AT22ED000000

$7,980.00


SPG6AT10FD000000

SPG6AT10FD000000

$10,740.00


SPG6AT10HD000000

SPG6AT10HD000000

$11,940.00


SPG6AT11FD000000

SPG6AT11FD000000

$10,380.00


SPG6AT11HD000000

SPG6AT11HD000000

$11,580.00


SPG6AT12HD000000

SPG6AT12HD000000

$11,580.00


SPG6AT13HD000000

SPG6AT13HD000000

$11,340.00


Details

Azbil SPG capacitance diaphragm vacuum gauges use a sapphire capacitance pressure sensor to achieve high accuracy and reliability and is built to keep zero shift. The gauges are compact and light weight. Self-heating models are available (45 °C, 125 °C, 150 °C, 160 °C, 180 °C and 200 °C). The SPG is especially suited for semiconductor manufacturing. Resolution is 1/10000FS. Gas -contacting materials sapphire, DSALOY (equivalent to Inconel), SUS316L. The SPG uses a single-crystal sapphire for excellent resistance to corrosion and high temperatures. Capacitive measurement has high repeatability even when used at high temperatures. High accurate measurement. Microprocessor-based digital PID control provides fast warm-up and stable sensor temperature (self-heating models), providing improved temperature management and cutting down the startup time. Easy zero point adjustment with automatic adjustment button or up/down buttons. The zero adjustment range is a wide ±20% FS, allowing long replacement/ calibration intervals and lower running costs. Status display LEDs show event output and vacuum gauge state (normal, warm-up in progress, and abnormal) at a glance. The gauge is equipped with 3 event replays that can be used for interlocks and 3 outputs status alarms for event settings like instrumentation abnormalities, warm-up finished and upper/lower pressure limits, etc. Working from a PC, user can monitor the SPG and easily change its settings using the SLP-SP5J70 Smart Loader-Package (sold separately). Conformity to IEC directive; CE -marked: compliant with EN 61326 and EN 50011.

Documents

Datasheets
Owner's Manuals

Accessories

SLP-SP5J70

SLP-SP5J70

$960.00