SPG5AT10RD000000

SPG5AT10RD000000

SKU SPG5AT10RD000000
UOM Each

Sensors - Pressure Sensors - Sapphire Capacitance Diaphragm Gauge - Standard Model - Pressure code T10, FS pressure ranges (absolute pressure) 133.32 Pa, without self-heating function, coupling 8 VCR (female) equivalent (SUS316L with electrolytic grinding), CE-marked (EN 61326-1)


Price $5,843.00


Details

Azbil SPG5AT10RD000000 capacitance diaphragm vacuum gauges use a sapphire capacitance pressure sensor to achieve high accuracy and reliability and is built to keep zero shift. The gauge is compact, lightweight, none self-heating model (self-heating models are available). The SPG is especially suited for semiconductor manufacturing. Resolution is 1/10000FS. Gas -contacting materials sapphire, DSALOY (equivalent to Inconel), SUS316L. The SPG uses a single-crystal sapphire for excellent resistance to corrosion and high temperatures. Capacitive measurement has high repeatability even when used at high temperatures. High accurate measurement. Easy zero point adjustment with automatic adjustment button or up/down buttons. The zero adjustment range is a wide ±20% FS, allowing long replacement/ calibration intervals and lower running costs. Status display LEDs show event output and vacuum gauge state (normal, warm-up in progress, and abnormal) at a glance. The gauge is equipped with 3 event replays that can be used for interlocks and 3 outputs status alarms for event settings like instrumentation abnormalities, warm-up finished and upper/lower pressure limits, etc. Working from a PC, user can monitor the SPG and easily change its settings using the SLP-SP5J70 Smart Loader-Package (sold separately). Conformity to IEC directive; CE -marked: compliant with EN 61326 and EN 50011.

Documents

Datasheets
Owner's Manuals

Accessories

SLP-SP5J70

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