Sensors - Pressure Sensors - Sapphire Capacitance Diaphragm Gauge - Standard Model - Pressure code T22, FS pressure ranges (absolute pressure) 200 Pa, self-heating temperature 150 °C, coupling 8 VCR (female) equivalent (SUS316L with electrolytic grinding), CE-marked (EN 61326-1)
Azbil SPG5AT22ED000000 capacitance diaphragm vacuum gauges use a sapphire capacitance pressure sensor to achieve high accuracy and reliability and is built to keep zero shift. The gauge is compact, lightweight, self-heating model (self-heating temperature 150 °C). The SPG is especially suited for semiconductor manufacturing. Resolution is 1/10000FS. Gas -contacting materials sapphire, DSALOY (equivalent to Inconel), SUS316L. The SPG uses a single-crystal sapphire for excellent resistance to corrosion and high temperatures. Capacitive measurement has high repeatability even when used at high temperatures. High accurate measurement. Microprocessor-based digital PID control provides fast warm-up and stable sensor temperature, providing improved temperature management cutting down the startup time. Easy zero point adjustment with automatic adjustment button or up/down buttons. The zero adjustment range is a wide ±20% FS, allowing long replacement/ calibration intervals and lower running costs. Status display LEDs show event output and vacuum gauge state (normal, warm-up in progress, and abnormal) at a glance. The gauge is equipped with 3 event replays that can be used for interlocks and 3 outputs status alarms for event settings like instrumentation abnormalities, warm-up finished and upper/lower pressure limits, etc. Working from a PC, user can monitor the SPG and easily change its settings using the SLP-SP5J70 Smart Loader-Package (sold separately). Conformity to IEC directive; CE -marked: compliant with EN 61326 and EN 50011.